• DocumentCode
    3636085
  • Title

    Application of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicine

  • Author

    Z. Lj. Petrovi?;M. Radmilovi?-Radenovi?;P. Maguire;M. Radeti?;N. Pua?;D. Mari?;B. Radenovi?;G. Malovi?

  • Author_Institution
    Institute of Physics Belgrade, University of Belgrade Pregrevica 118 POB 68 11080 Zemun, Serbia
  • fYear
    2010
  • Firstpage
    29
  • Lastpage
    36
  • Abstract
    In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
  • Keywords
    "Plasma applications","Plasma sources","Plasma properties","Production","Microelectronics","Nanostructures","Nanomaterials","Surface fitting","Physics","Sputtering"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Proceedings (MIEL), 2010 27th International Conference on
  • Print_ISBN
    978-1-4244-7200-0
  • Type

    conf

  • DOI
    10.1109/MIEL.2010.5490535
  • Filename
    5490535