DocumentCode
3636085
Title
Application of non-equilibrium plasmas in top-down and bottom-up nanotechnologies and biomedicine
Author
Z. Lj. Petrovi?;M. Radmilovi?-Radenovi?;P. Maguire;M. Radeti?;N. Pua?;D. Mari?;B. Radenovi?;G. Malovi?
Author_Institution
Institute of Physics Belgrade, University of Belgrade Pregrevica 118 POB 68 11080 Zemun, Serbia
fYear
2010
Firstpage
29
Lastpage
36
Abstract
In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
Keywords
"Plasma applications","Plasma sources","Plasma properties","Production","Microelectronics","Nanostructures","Nanomaterials","Surface fitting","Physics","Sputtering"
Publisher
ieee
Conference_Titel
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Print_ISBN
978-1-4244-7200-0
Type
conf
DOI
10.1109/MIEL.2010.5490535
Filename
5490535
Link To Document