Title :
Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation
Author :
JL. Muñoz-Gamarra;E. Marigó;J. Giner;A. Uranga;F. Torres;N. Barniol
Author_Institution :
Department of Electronics Engineering, Universitat Autò
Abstract :
Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved.
Keywords :
"Micromechanical devices","Oscillators","Optical resonators","CMOS integrated circuits","Resonant frequency","Frequency response","CMOS technology"
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556300
