Describing space-continuous models of microelectromechanical devices for behavioural simulation

Modern behavioural simulators and their hardware description languages enable the description of time-continuous and time-discrete models. In this work, a modelling technique is developed for the description of space-continuous models, where partial differential equations are used. A hierarchical library of partial differential equations and boundary conditions for microelectromechanical device modelling is created. Mechanically complex devices have been modelled for system-level simulation using this technique.