• DocumentCode
    3638521
  • Title

    Thermopile as THz detector

  • Author

    B. Szentpáli;P. Basa;P. Fürjes;G. Battistig;I. Bársony

  • Author_Institution
    Research Institute for Technical Physics and Materials Science P.O.B. 49, 1525 Budapest, Hungary
  • fYear
    2010
  • Firstpage
    275
  • Lastpage
    277
  • Abstract
    A novel MEMS thermopile structure is presented, in which the thermopairs act as dipole antennas. The induced current heats the hot point of the thermopairs. The thermoelectric output voltage is proportional to the absorbed radiation power. The antenna-like feature of the device is demonstrated by the dependence of the sensitivity on the polarization. 5.58 V/W responsivity was achieved at 0.1 THz without optimizing the structure and the measuring conditions.
  • Keywords
    "Temperature measurement","Silicon","Dipole antennas","Resistance heating","Biomembranes","Etching"
  • Publisher
    ieee
  • Conference_Titel
    Thz Radiation (TERA), 2010 2nd IEEE International Workshop
  • Print_ISBN
    978-1-4244-8296-2
  • Type

    conf

  • DOI
    10.1109/TERA.2010.5619943
  • Filename
    5619943
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3638521