• DocumentCode
    3638898
  • Title

    Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

  • Author

    Hooman A. Davani;Christian Grasse;Benjamin Kögel;Petter Westbergh;Christian Gierl;Karolina Zogal;Sandro Jatta;Gerhard Böhm;Tobias Gründl;Peter Meissner;Anders Larsson;Markus-Christian Amann

  • Author_Institution
    Technical University Darmstadt, Germany Department of Microwaves and Optics, Germany
  • fYear
    2010
  • Firstpage
    9
  • Lastpage
    10
  • Abstract
    We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.
  • Keywords
    "Vertical cavity surface emitting lasers","Biomembranes","Distributed Bragg reflectors","Tuning","Apertures","Gallium arsenide"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
  • ISSN
    0899-9406
  • Print_ISBN
    978-1-4244-5683-3
  • Type

    conf

  • DOI
    10.1109/ISLC.2010.5642777
  • Filename
    5642777
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3638898