Title :
CNT film grown on nanoporous silicon
Author :
E. Czerwosz;E. Kowalska;M. Kozłowski;H. Wronka;F. Craciunoiu;M. Miu;A. Dinescu
Author_Institution :
Tele &
Abstract :
Results of SEM characterization of CNT film grown on nanoporous silicon (NP-Si) plate covered with 2 step PVD/CVD layer are presented. SEM studies were performed for all stages of CNT film preparation process. It was found that the size of pores in NP-Si affects the final CNT film form and adhesion.
Keywords :
"Films","Silicon","Substrates","Mesoporous materials","Nickel","Carbon nanotubes","Scanning electron microscopy"
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650256
