DocumentCode
3639428
Title
Nanocrystalline diamond/amorphous composite carbon films prepared by PECVD technology for photocathode application
Author
J. Huran;N.I. Balalykin;G.D. Shirkov;P. Boháček;A.P. Kobzev;A. Valovič
Author_Institution
Institute of Electrical Engineering, Slovak Academy of Sciences, Dú
fYear
2010
Firstpage
77
Lastpage
80
Abstract
Nanocrystalline diamond/amorphous composite carbon films were deposited by plasma enhanced chemical vapour deposition method. The concentrations of species in the films were determined by RBS (Rutherford backscattering spectrometry) and ERD (elastic recoil detection) methods. The RBS results showed the main concentrations of C in the films. The concentration of hydrogen was approximately 20 at.%. Chemical compositions were analyzed by FTIR spectroscopy. IR results showed the presence of C-H specific bonds. Film was used for photocathode application. The original quantum efficiency of prepared photocathode at energy of FH 15,6 mJ was 1,43×10−6 %.
Keywords
"Films","Diamond-like carbon","Cathodes","Temperature measurement","Argon","Plasmas","Silicon"
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Print_ISBN
978-1-4244-8574-1
Type
conf
DOI
10.1109/ASDAM.2010.5666343
Filename
5666343
Link To Document