Special Section on the 2013 International Conference on Microelectronic Test Structures (ICMTS)

This special section is devoted to the 2013 International Conference on Microelectronic Test Structures (ICMTS). Since 1988, the conference is held annually, alternating the locations by a three-year cycle in the USA, Europe and Asia. Test structures are indispensable for the characterization and development of any microelectronic devices and processes. The conference provides a unique forum for designers and users of test structures in all areas of microelectronics, to discuss recent developments and future directions.