DocumentCode
36426
Title
Correction on “Effect of Temperature Variation and Packaging on SOI MEMS Inductor With DRIE Trench on Low-Resistivity Substrate” [Feb 14 400-407]
Author
Bhattacharya, Avik ; Bhattacharyya, Tarun Kanti
Author_Institution
Advanced Technology Development Centre, IIT Kharagpur, Kharagpur, India
Volume
62
Issue
1
fYear
2015
fDate
Jan. 2015
Firstpage
236
Lastpage
236
Abstract
In the above paper (ibid., vol. 61, no. 2, pp. 400-407, Feb. 2014), an equation contains a typographical error. The correct equation is presented here.
Keywords
Inductors; Micromachining; Micromechanical devices; Silicon-on-insulator; Sputter etching; Substrates;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2014.2366299
Filename
6953139
Link To Document