Title :
Comparison of air coplanar microprobes for on-wafer measurements at W-band
Author :
A. Pham;J. Laskar;S. Basu;J. Pence
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
6/19/1905 12:00:00 AM
Abstract :
We apply the on-wafer thru-reflect-line (TRL) and thru-reflect-match calibrations and measurements to evaluate and compare the performance of waveguide and coax fed microprobes at W-band. The results compare the repeatability, isolation, and performance of these probes.
Keywords :
"Calibration","Probes","Coplanar waveguides","Connectors","Coaxial components","Measurement standards","Impedance","Dielectric measurements","Millimeter wave technology","Surface waves"
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.596717
