• DocumentCode
    3644135
  • Title

    Reliability accelerated tests for microsystems

  • Author

    Marius Bâzu;Lucian Gălăteanu;Virgil Emil Ilian

  • Author_Institution
    National Institute for Research and Development in Microtechnologies, IMT-Bucharest, 126A (32B), Erou Iancu Nicolae str., 077190 Voluntari, Jud. Ilfov, ROMANIA
  • fYear
    2011
  • fDate
    5/1/2011 12:00:00 AM
  • Firstpage
    182
  • Lastpage
    187
  • Abstract
    Accelerated testing is the current option in reliability. The paper introduces the main types of reliability accelerated tests used for microsystems: quantitative and qualitative ones, respectively. Then, a case study is shown, for a MEMS inertial sensor, which is a 3-Axis linear accelerometer. A combination of quantitative and qualitative tests was used, which allowed to estimate, by using “the worst case” approach, a value for the failure rate of the batch of devices (<;10-7h-1), showing the high reliability of the studied devices.
  • Keywords
    "Reliability","Stress","Life estimation","Failure analysis","Micromechanical devices","Temperature measurement"
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology (ISSE), 2011 34th International Spring Seminar on
  • ISSN
    2161-2528
  • Print_ISBN
    978-1-4577-2111-3
  • Electronic_ISBN
    2161-2536
  • Type

    conf

  • DOI
    10.1109/ISSE.2011.6053574
  • Filename
    6053574
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3644135