Reliability accelerated tests for microsystems

Accelerated testing is the current option in reliability. The paper introduces the main types of reliability accelerated tests used for microsystems: quantitative and qualitative ones, respectively. Then, a case study is shown, for a MEMS inertial sensor, which is a 3-Axis linear accelerometer. A combination of quantitative and qualitative tests was used, which allowed to estimate, by using “the worst case” approach, a value for the failure rate of the batch of devices (<;10^-7h^-1), showing the high reliability of the studied devices.