• DocumentCode
    3644902
  • Title

    Micromachining Of Silica Glasses With 157nm F/sub 2/ Laser Radiation

  • Author

    T. Yamanishi; Jianhao Yang;K. Kurosawa;P.R. Herman;B. Jackson;K. Beckley

  • Author_Institution
    University of Miyazaki, Miyazaki 889-21, JAPAN
  • fYear
    1997
  • Firstpage
    214
  • Lastpage
    214
  • Keywords
    "Micromachining","Silicon compounds","Glass","Waveguide lasers","Laser ablation","Optical materials","Optical waveguides","Optical films","Laser beam cutting","Surface emitting lasers"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO/Pacific Rim ´97., Pacific Rim Conference on
  • Print_ISBN
    0-7803-3889-8
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1997.610785
  • Filename
    610785
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3644902