Title :
Micromachining Of Silica Glasses With 157nm F/sub 2/ Laser Radiation
Author :
T. Yamanishi; Jianhao Yang;K. Kurosawa;P.R. Herman;B. Jackson;K. Beckley
Author_Institution :
University of Miyazaki, Miyazaki 889-21, JAPAN
Keywords :
"Micromachining","Silicon compounds","Glass","Waveguide lasers","Laser ablation","Optical materials","Optical waveguides","Optical films","Laser beam cutting","Surface emitting lasers"
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim ´97., Pacific Rim Conference on
Print_ISBN :
0-7803-3889-8
DOI :
10.1109/CLEOPR.1997.610785
