Adhesion-type micro end effector for micromanipulation

Micro manipulation is required for assembly and maintenance of micro machines and their parts. In this paper, we propose a new pick up and release method for micromanipulation. The proposed method utilizes pressure change based on temperature change inside the micro holes made on the end-effector surface. In order to pick up the micro object, the end-effector temperature is increased to exceed room temperature before touching the object. After contact with the object, its temperature is decreased and negative pressure is generated inside the micro holes to pick it up. To release it, the end-effector temperature is increased again. This method realizes quick response due to its scale advantage as long as it is miniaturized in micro order. We made a prototype end-effector by Si surface micromachining. We analyzed the static performance of this end-effector and conducted experiments. Finally, effectiveness of the proposed method is shown.