Title :
A Survey of Yield Modeling and Yield Enhancement Methods
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Fast yield learning is critical to bringing products to the market in a timely fashion and is strongly linked to product revenues. This paper reviews methods to enable efficient yield learning, focusing on methods to quantify the most significant yield detractors and on in-line excursion detection methodologies.
Keywords :
integrated circuit modelling; integrated circuit yield; in-line excursion detection; product revenues; yield detractors; yield enhancement methods; yield learning; yield modeling; Data models; Mathematical model; Probes; Production; Semiconductor device modeling; Systematics; Throughput; Excursion detection; random yield; systematic yield; yield; yield enhancement; yield modeling;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2243766
