DocumentCode
36455
Title
A Survey of Yield Modeling and Yield Enhancement Methods
Author
Milor, Linda
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume
26
Issue
2
fYear
2013
fDate
May-13
Firstpage
196
Lastpage
213
Abstract
Fast yield learning is critical to bringing products to the market in a timely fashion and is strongly linked to product revenues. This paper reviews methods to enable efficient yield learning, focusing on methods to quantify the most significant yield detractors and on in-line excursion detection methodologies.
Keywords
integrated circuit modelling; integrated circuit yield; in-line excursion detection; product revenues; yield detractors; yield enhancement methods; yield learning; yield modeling; Data models; Mathematical model; Probes; Production; Semiconductor device modeling; Systematics; Throughput; Excursion detection; random yield; systematic yield; yield; yield enhancement; yield modeling;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2243766
Filename
6423953
Link To Document