Title :
Application nanoindenter as nanolithography tool
Author :
Maria Ramiączek-Krasowska;Adam Szyszka;Regina Paszkiewicz;Jaroslav Lukes
Author_Institution :
Wroclaw University of Technology, Faculty of Microsysem Electronics and Photonics, Janiszewskiego 11/17 Street, 50-372 Wroclaw, Poland
fDate :
7/1/2011 12:00:00 AM
Abstract :
In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.
Keywords :
"Force","Resists","Gold","Microscopy","Photonics","Europe"
Conference_Titel :
Students and Young Scientists Workshop, 2011 International
Print_ISBN :
978-1-4577-1651-5
DOI :
10.1109/STYSW.2011.6155847
