Title :
Atomic force microscopy for low dimensional metal strips creation and measurements
Author :
Maria Ramiączek-Krasowska;Adam Szyszka;Joanna Prażmowska;Regina Paszkiewicz
Author_Institution :
Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego Street 11/17, 50-372 Wroclaw, Poland
fDate :
7/1/2011 12:00:00 AM
Abstract :
In the paper the lithography methods are presented. Also a lithography with use AFM systems is summarized. In the work the reconstruction of the pattern created by nanoscratching and lift-off technique is show and discussed. The resolution of created structures for certain parameters of nanoscratching was also defined. Obtained resolution of reconstructed pattern was about 120 nm what was comparable with the thickness of gold masking layer.
Keywords :
"Lithography","Metals","Force","Resists","Surface topography","Atomic force microscopy"
Conference_Titel :
Students and Young Scientists Workshop, 2011 International
Print_ISBN :
978-1-4577-1651-5
DOI :
10.1109/STYSW.2011.6155848
