• DocumentCode
    3645928
  • Title

    Atomic force microscopy for low dimensional metal strips creation and measurements

  • Author

    Maria Ramiączek-Krasowska;Adam Szyszka;Joanna Prażmowska;Regina Paszkiewicz

  • Author_Institution
    Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego Street 11/17, 50-372 Wroclaw, Poland
  • fYear
    2011
  • fDate
    7/1/2011 12:00:00 AM
  • Firstpage
    73
  • Lastpage
    76
  • Abstract
    In the paper the lithography methods are presented. Also a lithography with use AFM systems is summarized. In the work the reconstruction of the pattern created by nanoscratching and lift-off technique is show and discussed. The resolution of created structures for certain parameters of nanoscratching was also defined. Obtained resolution of reconstructed pattern was about 120 nm what was comparable with the thickness of gold masking layer.
  • Keywords
    "Lithography","Metals","Force","Resists","Surface topography","Atomic force microscopy"
  • Publisher
    ieee
  • Conference_Titel
    Students and Young Scientists Workshop, 2011 International
  • ISSN
    1939-4381
  • Print_ISBN
    978-1-4577-1651-5
  • Type

    conf

  • DOI
    10.1109/STYSW.2011.6155848
  • Filename
    6155848
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3645928