• DocumentCode
    3646994
  • Title

    Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids

  • Author

    J. Matović;Z. Jakšić;P. Radovanović

  • Author_Institution
    Institute of Sensor and Actuator Systems, Vienna University of Technology, 1040 Wien, Floragasse 7/II, Austria
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    135
  • Lastpage
    138
  • Abstract
    Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.
  • Keywords
    "Microelectronics","Nickel","Abstracts","Surface tension","Manganese","Viscosity"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics (MIEL), 2012 28th International Conference on
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-0237-1
  • Type

    conf

  • DOI
    10.1109/MIEL.2012.6222816
  • Filename
    6222816