DocumentCode
3646994
Title
Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids
Author
J. Matović;Z. Jakšić;P. Radovanović
Author_Institution
Institute of Sensor and Actuator Systems, Vienna University of Technology, 1040 Wien, Floragasse 7/II, Austria
fYear
2012
fDate
5/1/2012 12:00:00 AM
Firstpage
135
Lastpage
138
Abstract
Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.
Keywords
"Microelectronics","Nickel","Abstracts","Surface tension","Manganese","Viscosity"
Publisher
ieee
Conference_Titel
Microelectronics (MIEL), 2012 28th International Conference on
ISSN
pending
Print_ISBN
978-1-4673-0237-1
Type
conf
DOI
10.1109/MIEL.2012.6222816
Filename
6222816
Link To Document