Helium sensing using multipurpose thermopile-based MEMS devices

In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.