Title :
Modeling of the conductivity alteration in the gold thin film-based mercury sensor using the fuchs theory
Author :
M. Sarajlić;Z. Djurić;V. Jović
Author_Institution :
IHTM, Center for Microelectronic Technologies and Single Crystal, Njegoš
fDate :
5/1/2012 12:00:00 AM
Abstract :
We report on the development and testing of the metallic mercury sensor. Sensor is based on the gold thin film layer where sensing is achieved by formation of the gold-mercury amalgam. Complete technological procedure and design is performed at IHTM-CMTM in Belgrade, Serbia. We test the sensor by exposing it to the various mercury concentrations and compare results to the Langmuir adsorption theory. We explain resistivity alteration during gold-mercury adsorption by the Fuchs theory of conductivity in thin films. This is the basis for the more detailed understanding of the sensor functionality.
Keywords :
"Conductivity","Gold","Resists","Mercury (metals)","Films","Microelectronics","Mathematical model"
Conference_Titel :
Microelectronics (MIEL), 2012 28th International Conference on
Print_ISBN :
978-1-4673-0237-1
DOI :
10.1109/MIEL.2012.6222820