• DocumentCode
    3647031
  • Title

    Low loss waveguide integration within a thin-SOI CMOS foundry

  • Author

    Jason S. Orcutt;Benjamin Moss;Chen Sun;Jonathan Leu;Michael Georgas;Stevan Urosevic;Hanqing Li;Jie Sun;Matthew Weaver;Eugen Zgraggen;Rajeev J. Ram;Vladimir Stojanovic;Jeffrey Shainline;Milos Popovic

  • Author_Institution
    Department of Electrical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    25
  • Lastpage
    26
  • Abstract
    By requiring zero process changes and by complying with established electronic circuit design rules, photonic devices formed with 3dB/cm waveguides were fabricated alongside transistors achieving 4ps stage delay in a 45nm thin-SOI CMOS foundry.
  • Keywords
    "Photonics","CMOS integrated circuits","Silicon","Foundries","Optical waveguides","CMOS technology","Transistors"
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2012 IEEE
  • Print_ISBN
    978-1-4577-1620-1
  • Type

    conf

  • DOI
    10.1109/OIC.2012.6224465
  • Filename
    6224465
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3647031