Title :
Fractal structures for low-resistance large area AlGaN/GaN power transistors
Author :
R. Reiner;P. Waltereit;F. Benkhelifa;S. Muller;S. Müller;H. Walcher;S. Wagner;R. Quay;M. Schlechtweg;O. Ambacher
Author_Institution :
Fraunhofer Inst. for Appl. Solid State Phys., IAF, Freiburg, Germany
fDate :
6/1/2012 12:00:00 AM
Abstract :
This work introduces a new design approach for the use of fractal structures for low-resistance large area transistors structures. Aspects of layout with adapted current density and high-area utilization are considered. Furthermore the work presents a realization of fractal structures in AlGaN/GaN technology. Both static and dynamic behaviors are characterized. The fabricated devices achieve a breakdown voltage of VBR >; 700V and on-state currents of ID = 40A at VGS = 1V.
Keywords :
"Logic gates","Fractals","Metallization","Fingers","Transistors","Resistance","Gallium nitride"
Conference_Titel :
Power Semiconductor Devices and ICs (ISPSD), 2012 24th International Symposium on
Print_ISBN :
978-1-4577-1594-5
Electronic_ISBN :
1946-0201
DOI :
10.1109/ISPSD.2012.6229091