Resonant sensors for wireless pressure monitoring realized in LTCC-technology

The purpose of this paper is to demonstrate influence of material properties and fabrication technique on the performance of embedded pressure sensors. Three different wireless pressure sensors, operating in the MHz, based on a passive wireless inductor-capacitor resonant circuit are designed and fabricated in the LTCC technology. The first design of sensor where sensor membranes are formed as a sandwich composition comprising electrode layers which are placed between two dielectric tapes can be found suitable for applications in chemically aggressive environments. The second pressure sensor realization was designed to meet the requirements of higher sensitivity. The last sensor design was realized with intention to minimize overall sensor dimension. Obtained results show good agreement with foreseen expectations.