• DocumentCode
    3648609
  • Title

    Novel mechanisms for millimeter range piston actuation of vertical micromirrors and microlenses

  • Author

    Sagnik Pal;Sean R. Samuelson;Huikai Xie

  • Author_Institution
    Department of Electrical and Computer Engineering, University of Florida, Gainesville
  • fYear
    2012
  • Firstpage
    97
  • Lastpage
    98
  • Abstract
    Simulations and fabrication of two novel multimorph based in-plane actuator designs are reported. The ~1mm in-plane displacement capability of the actuators is a two orders of magnitude improvement over existing designs. Possible applications include the piston actuation of vertical micromirrors and microlenses.
  • Keywords
    "Transducers","Actuators","Optical device fabrication","Optical interferometry","Micromirrors","Lenses"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-1511-2
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMEMS.2012.6318820
  • Filename
    6318820
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3648609