Title :
Novel mechanisms for millimeter range piston actuation of vertical micromirrors and microlenses
Author :
Sagnik Pal;Sean R. Samuelson;Huikai Xie
Author_Institution :
Department of Electrical and Computer Engineering, University of Florida, Gainesville
Abstract :
Simulations and fabrication of two novel multimorph based in-plane actuator designs are reported. The ~1mm in-plane displacement capability of the actuators is a two orders of magnitude improvement over existing designs. Possible applications include the piston actuation of vertical micromirrors and microlenses.
Keywords :
"Transducers","Actuators","Optical device fabrication","Optical interferometry","Micromirrors","Lenses"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Print_ISBN :
978-1-4577-1511-2
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMEMS.2012.6318820
