• DocumentCode
    3648653
  • Title

    Submicron silicon waveguides and optical splitters for mid-infrared applications

  • Author

    Milan M. Milošević;Milos Nedeljkovic;Taha M. Ben Masaud;Ehsan Jaberansary;Harold M. H. Chong;Graham T. Reed;Goran Z. Mashanovich

  • Author_Institution
    Advanced Technology Institute, Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, GU2 7XH, UK
  • fYear
    2012
  • Firstpage
    15
  • Lastpage
    17
  • Abstract
    We report on the design, fabrication and characterisation of submicron silicon-on-insulator strip waveguides at a 3.74 μm wavelength. Experimental results for 1×2 multi-mode interference splitters are also given.
  • Keywords
    "Optical waveguides","Silicon","Propagation losses","Strips","Photonics","Optimized production technology","Optical device fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4577-0826-8
  • Type

    conf

  • DOI
    10.1109/GROUP4.2012.6324071
  • Filename
    6324071