DocumentCode
3648653
Title
Submicron silicon waveguides and optical splitters for mid-infrared applications
Author
Milan M. Milošević;Milos Nedeljkovic;Taha M. Ben Masaud;Ehsan Jaberansary;Harold M. H. Chong;Graham T. Reed;Goran Z. Mashanovich
Author_Institution
Advanced Technology Institute, Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, GU2 7XH, UK
fYear
2012
Firstpage
15
Lastpage
17
Abstract
We report on the design, fabrication and characterisation of submicron silicon-on-insulator strip waveguides at a 3.74 μm wavelength. Experimental results for 1×2 multi-mode interference splitters are also given.
Keywords
"Optical waveguides","Silicon","Propagation losses","Strips","Photonics","Optimized production technology","Optical device fabrication"
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
ISSN
1949-2081
Print_ISBN
978-1-4577-0826-8
Type
conf
DOI
10.1109/GROUP4.2012.6324071
Filename
6324071
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