Title :
Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond
Author :
Michael J. Burek;Brendan J. Shields;Nathalie de Leon;Birgit M. Hausmann;Yiwen Chu;Qimin Quan;Mikhail Lukin;Marko Lončar
Author_Institution :
School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, MA 02138, USA
fDate :
5/1/2012 12:00:00 AM
Abstract :
A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.
Keywords :
"Diamond-like carbon","Cavity resonators","Photonic crystals","Photonics","Etching","Fabrication","Optical waveguides"
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Print_ISBN :
978-1-4673-1839-6
DOI :
10.1364/CLEO_SI.2012.CM1M.2
