Title :
Submicrometer-width TiO2 waveguides
Author :
C. C. Evans;J. D. B. Bradley;J. T. Choy;O. Reshef;P. B. Deotare;M. Lončar;E. Mazur
Author_Institution :
School of Engineering and Applied Sciences, Harvard University, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
fDate :
5/1/2012 12:00:00 AM
Abstract :
We fabricate submicrometer-width TiO2 strip waveguides and measure optical losses at 633, 780, and 1550 nm. Losses of 30, 13, and 4 dB/cm (respectively) demonstrate that TiO2 is suitable for visible-to-infrared on-chip microphotonic devices.
Keywords :
"Optical waveguides","Optical losses","Loss measurement","Optical device fabrication","Strips","Optical films"
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Print_ISBN :
978-1-4673-1839-6