DocumentCode
3648682
Title
Micromachining with femtosecond laser written radial polarization converter
Author
Martynas Beresna;Mindaugas Gecevičius;Peter G. Kazansky;Audrey Champion;Yves Bellouard
Author_Institution
Optoelectronics Research Centre, University of Southampton, SO17 1BJ Southampton, UK
fYear
2012
fDate
5/1/2012 12:00:00 AM
Firstpage
1
Lastpage
2
Abstract
Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization.
Keywords
"Laser beams","Ultrafast optics","Writing","Etching","Fabrication","Silicon compounds","Lasers"
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
ISSN
2160-8989
Print_ISBN
978-1-4673-1839-6
Type
conf
DOI
10.1364/CLEO_SI.2012.CM4K.7
Filename
6325799
Link To Document