Title :
Micromachining with femtosecond laser written radial polarization converter
Author :
Martynas Beresna;Mindaugas Gecevičius;Peter G. Kazansky;Audrey Champion;Yves Bellouard
Author_Institution :
Optoelectronics Research Centre, University of Southampton, SO17 1BJ Southampton, UK
fDate :
5/1/2012 12:00:00 AM
Abstract :
Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization.
Keywords :
"Laser beams","Ultrafast optics","Writing","Etching","Fabrication","Silicon compounds","Lasers"
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Print_ISBN :
978-1-4673-1839-6
DOI :
10.1364/CLEO_SI.2012.CM4K.7
