Characterization, simulation and macro-modelling of vertical Hall devices

A new macro-model of a vertical Hall sensor and the corresponding procedure for macro-model parameter extraction are presented. The active volume of the sensor is defined by the process simulation. The modulation effects of the active volume of the sensor and the sources of the non-linearity of the sensor response are examined by means of device simulation. In accordance with the simulation results and measured data a macro-model based on the sensor physics is built. The parameters of this model are extracted from the device simulation data.