Hierarchical modelling of microsystems in an object-oriented hardware description language

Hardware description languages can be used for the description of models of micromechanical transducers. This enables simulation of microsystems, i.e. micromechanics with processing electronics. If such a language is object-oriented, a space-continuous micromechanical model can be described as a composition of previously defined submodels of mechanical structures. Inheritance properties of an object-oriented language make this hierarchical description very straightforward. For spatial discretization of models, we have used both finite difference and finite element methods.