• DocumentCode
    3648753
  • Title

    High frequency circuits manufactured by micromachining techniques

  • Author

    B. Milovanovic;V. Markovic;D. Stojkovic

  • Author_Institution
    Fac. of Electron. Eng., Nis Univ., Serbia
  • Volume
    2
  • fYear
    1997
  • Firstpage
    523
  • Abstract
    Micromachining technology is successfully used for high frequency applications, especially for millimeter and submillimeter circuits. The aim of this paper is to shed some light on this new and very promising field and give a survey of some recent developments. A variety of planar transmission lines, antennas, tuning elements, etc., manufactured by micromachining techniques, are demonstrated.
  • Keywords
    "Frequency","Manufacturing","Micromachining","Biomembranes","Dielectric losses","Planar transmission lines","Propagation losses","VHF circuits","Micromechanical devices","Semiconductor materials"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1997. Proceedings., 1997 21st International Conference on
  • Print_ISBN
    0-7803-3664-X
  • Type

    conf

  • DOI
    10.1109/ICMEL.1997.632893
  • Filename
    632893
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3648753