Title :
Compensation of thermocouple reference junction temperature variation by a silicon temperature sensor
Author :
M. Zlatanovic;M. Dukic;I. Popovic;Z. Zirojevic
Author_Institution :
Fac. of Electr. Eng., Belgrade Univ., Serbia
Abstract :
A new method for the reference junction temperature compensation of a K type thermocouple based thermometer by using a PTC silicon resistive sensor KTY 10 is described. The thermometer is intended for the temperature measurement in the range from 20/spl deg/C to 600/spl deg/C during plasma deposition and plasma nitriding processes, but it can be successfully used in other applications where the reference junction temperature is varied during the measurement.
Keywords :
"Temperature sensors","Silicon","Plasma temperature","Temperature distribution","Thermal sensors","Instruments","Sensor phenomena and characterization","Temperature measurement","Plasma applications","Plasma measurements"
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632904
