• DocumentCode
    3649291
  • Title

    Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic

  • Author

    L.J. Guerin;M. Bossel;M. Demierre;S. Calmes;P. Renaud

  • Author_Institution
    Inst. of Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
  • Volume
    2
  • fYear
    1997
  • Firstpage
    1419
  • Abstract
    In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work will be used for the realisation of thermal flow-sensors.
  • Keywords
    "Costs","Fabrication","Microchannel","Resists","Filling","Microfluidics","Microstructure","Silicon","Solvents","Polymer films"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS ´97 Chicago., 1997 International Conference on
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.635730
  • Filename
    635730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3649291