Title :
Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic
Author :
L.J. Guerin;M. Bossel;M. Demierre;S. Calmes;P. Renaud
Author_Institution :
Inst. of Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work will be used for the realisation of thermal flow-sensors.
Keywords :
"Costs","Fabrication","Microchannel","Resists","Filling","Microfluidics","Microstructure","Silicon","Solvents","Polymer films"
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS ´97 Chicago., 1997 International Conference on
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635730
