Title :
Capacitive displacement sensor embedded in LTCC packaging
Author :
Nelu Blaž;Andrea Marić;Ljiljana Živanov;Goran Radosavljević
Author_Institution :
Faculty of Technical Sciences, Department of Power, Electronics and Communication, University of Novi Sad, Novi Sad, Serbia
Abstract :
This paper presents the development of capacitive displacement sensor comprised of a movable dielectric stick and a fixed capacitor with a micro channel. Movement of the stick causes change of the sensor capacitance and therefore enables detection of the stick displacement in the plane. Electrical and mathematical sensor model have been developed. The sensor has been fabricated in the Low Temperature Co-fired Ceramics (LTCC) technology and experimentally characterized.
Keywords :
"Capacitance","Robot sensing systems","Capacitors","Displacement measurement","Dielectric measurements","Mathematical model"
Conference_Titel :
Design and Technology in Electronic Packaging (SIITME), 2012 IEEE 18th International Symposium for
Print_ISBN :
978-1-4673-4757-0
DOI :
10.1109/SIITME.2012.6384346
