DocumentCode
3651056
Title
Vibrational Properties of Si-N and Si-H in a-Si:(H,N) alloys
Author
Shu-Ya Lin
fYear
1993
fDate
6/15/1905 12:00:00 AM
Firstpage
101
Keywords
"Frequency","Atomic layer deposition","Substrates","Temperature","Semiconductor films","Glow discharges","Bonding forces","Chaos","Physics","Amorphous silicon"
Publisher
ieee
Conference_Titel
Semiconductor Modeling & Simulation, 1993. SMS Technical Digest. 1993 Symposium on
Print_ISBN
0-7803-1225-2
Type
conf
DOI
10.1109/SMS.1993.664575
Filename
664575
Link To Document