• DocumentCode
    3652639
  • Title

    Direct laser writing with variable repetition rate

  • Author

    J. Fischer;J. Müller;J. Kaschke;M. Wegener

  • Author_Institution
    Inst. fur Nanotechnol., Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
  • fYear
    2013
  • fDate
    6/1/2013 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We perform femtosecond direct laser writing at repetition rates between 1 kHz and 80 MHz. From the observed weak dependence of the threshold power on the repetition rate, we conclude that no fundamentally different structuring regimes exist.
  • Keywords
    "Polymers","Resists","Explosions","Writing","Absorption","Chemical lasers"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • ISSN
    2160-8989
  • Type

    conf

  • DOI
    10.1364/CLEO_SI.2013.CM4H.5
  • Filename
    6833278
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3652639