• DocumentCode
    3655887
  • Title

    Development model of research sample surface with piezoresistive deflection registration of cantilever beam

  • Author

    Bohdan Dupak;Mykhaylo Lobur;Roman Ivantsiv

  • Author_Institution
    CAD Department, Lviv Polytechnic National University, UKRAINE, S. Bandery street 12
  • fYear
    2015
  • Firstpage
    60
  • Lastpage
    62
  • Abstract
    In this paper the model of research sample surface with registration piezoresistive deflection of beam cantilever mechanical type under ultrasonic acoustic wave.
  • Keywords
    "Structural beams","Acoustic beams","Acoustics","Piezoresistance","Laser beams","Surface topography","Surface treatment"
  • Publisher
    ieee
  • Conference_Titel
    Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
  • Type

    conf

  • DOI
    10.1109/CADSM.2015.7230796
  • Filename
    7230796
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3655887