• DocumentCode
    3655895
  • Title

    A new optical silicon MEMS pressure sensor with computer-aided detection

  • Author

    Katarzyna Sare?o;A. G?recka-Drzazga;Jan Dziuban;Danylo Lizanets

  • Author_Institution
    Electronic Microsystems and Photonic Department, Wroclaw University of Technology, POLAND, Wroc?aw, Janiszewskiego street 11/17
  • fYear
    2015
  • Firstpage
    90
  • Lastpage
    92
  • Abstract
    A new optical MEMS silicon pressure sensor for use in high temperature (up to 450°C) and high radiation environments has been developed. Preliminary tests of the pressure sensor integrated with the components of the optical detection system and software has showed accurate detection of pressure by purely optical system.
  • Keywords
    "Software","Optical reflection","Optical sensors","Biomedical optical imaging","Silicon","Micromechanical devices"
  • Publisher
    ieee
  • Conference_Titel
    Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
  • Type

    conf

  • DOI
    10.1109/CADSM.2015.7230804
  • Filename
    7230804
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3655895