• DocumentCode
    3655975
  • Title

    Development of UML diagrams to improve production cantilevers of mechanical type

  • Author

    Bohdan Dupak;Halia Kovalchuk;Pavlo Denysyuk;Tetyana Melnyk

  • Author_Institution
    CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
  • fYear
    2015
  • Firstpage
    472
  • Lastpage
    474
  • Abstract
    This paper discusses and highlights the principle of operation, use, production and composition cantilevers mechanical type.
  • Keywords
    "Force","Atomic force microscopy","Probes","Structural beams","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
  • Type

    conf

  • DOI
    10.1109/CADSM.2015.7230908
  • Filename
    7230908
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3655975