Modeling hysteresis, creep, and dynamic effects for piezoactuator-based nano-positioning systems

In this paper, a model characterizing hysteresis, creep, and dynamic effects is proposed for simulation and control system design of piezoactuator-based nano-positioning system. Fractional-order integrator is employed to characterize the creep behavior at low frequencies. Maxwell resistive capacitor (MRC) model is used to capture the rate-independent hysteresis lying in the electric domain between the applied voltage and the surface charge. The remaining high-frequency dynamics, including the dynamics of the mechanical structure, the voltage amplifier, and the capacitive sensor, are described by a high-order linear system. The proposed model is verified experimentally.