Design and Fabrication of IDT Surface Acoustic Wave Device for Biosensor Application

The Surface Acoustic Wave (SAW) is one of sensor types that can be used in multifunction in the sensing field. Hence, the purpose of this project is to study and investigate the design of SAW device for biosensor application. Several parameters and design has been varied and proposed to investigate the effect to the SAW Biosensor performance. The parameter such as total SAW IDT fingers and Split IDT design has successfully designed using AutoCAD software and fabricated using conventional lithography method. The Aluminum IDT was fabricated on ZnO/Si piezoelectric substrate and show a good result in term of electrical characterization and frequency response. From result, the proposed design with many fingers can increase the center frequency response while the split design control the insertion loss. It shows that these designs are suitable to apply in the SAW biosensor application.