• DocumentCode
    3662560
  • Title

    CMOS-MEMS novel resonator for filter tuning

  • Author

    H. Goktas;M.E. Zaghloul

  • Author_Institution
    Department of Electrical and Computer Engineering, The George Washington University, DC 20052, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Novel MEMS resonators are presented in this work, and were designed in CMOS process. The devices were fabricated and tested. The work shows the combined CMOS and MEMS process. The resonators are designed in Fixed -Fixed beam structure. Applications are low power temperature tuning filters, and temperature sensors.
  • Keywords
    "Laser beams","Resonant frequency","Tuning","Micromechanical devices","Heating","Frequency measurement","Measurement by laser beam"
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems (MWSCAS), 2015 IEEE 58th International Midwest Symposium on
  • Type

    conf

  • DOI
    10.1109/MWSCAS.2015.7282017
  • Filename
    7282017
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3662560