• DocumentCode
    3662626
  • Title

    Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides

  • Author

    Matthew A. Stott;Thomas A. Wall;Erik Hamilton;Roger Chu;Aaron R. Hawkins;Damla Ozcelik;Joshua W. Parks;Gopikrishnan G. Meena;Holger Schmidt

  • Author_Institution
    Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602, United States
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Silicate spin-on-glass can be used as a protective barrier to coat PECVD SiO2 optofluidic waveguides in order to smooth out surface topology, and lessen moisture absorption on top of the waveguide. The measured optical throughput and mode confinement improved when compared to uncoated waveguides.
  • Keywords
    "Optical waveguides","Optical refraction","Optical variables control","Throughput","Films","Temperature measurement","Optical device fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems (MWSCAS), 2015 IEEE 58th International Midwest Symposium on
  • Type

    conf

  • DOI
    10.1109/MWSCAS.2015.7282085
  • Filename
    7282085
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3662626