• DocumentCode
    3664731
  • Title

    Study on cell shape in 3D NAND flash memory

  • Author

    Wei Feng;Nine Deng

  • Author_Institution
    Institute of Microelectronics, Tsinghua University, Beijing, China, 100084
  • fYear
    2015
  • fDate
    6/1/2015 12:00:00 AM
  • Firstpage
    387
  • Lastpage
    390
  • Abstract
    All kinds of cell structures are appeared in 3D NAND flash technologies and all seem to be promising. In this paper, detail comparisons among the cell structures of them are presented. The theoretical derivation and simulation results both support that the cylindrical cell structure has better program/erase speed and memory window.
  • Keywords
    "Conferences","Electron devices","Solid state circuits"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Solid-State Circuits (EDSSC), 2015 IEEE International Conference on
  • Print_ISBN
    978-1-4799-8362-9
  • Type

    conf

  • DOI
    10.1109/EDSSC.2015.7285132
  • Filename
    7285132