Vibration suppression of galvano mirror considering whirling of shaft

Main movement of a galvano mirror is the rolling motion. However, since the structure of galvano mirror is cantilever, this mirror is vertically vibrated to mirror reflective surface. This paper considers the suppression of the above vibration, which is called pitching vibration. Although the galvano mirror is equipped with an encoder to detect the roll angle of mirror, the pitching vibration of mirror cannot be detected. To overcome this problem, the pitching vibration is verified by the frequency response and the time response using two dimensional position sensitive detector. Moreover, three rubbers with different hardness are inserted on the basis of a structure of the motor shaft in order to suppress the vibration.