A consideration of parameter identification of a linear stage using particle swarm optimization

This paper considers the model-based controller in order to achieve the high speed and high precision positioning of a linear stage. In the controller design, particle swarm optimization (PSO) is employed for the parameter identification of the linear stage. Particles of the PSO are updated so that the difference between simulation and experimental results becomes small. After the parameter identification, the feedforward controller whose parameters correspond to the identified model of the linear stage is designed. Effectiveness of the proposed method is shown by simulation and experiment.