Research on scheduling problem of single-arm cluster tools with residency time constraints

This paper considers the scheduling model and schedulability for single-arm cluster tools with wafer residency time constraints, and constructs a mixed integer programming model with the temporal constraints of both single-arm robot and processing module. The rationality of equivalent processing time for parallel module was theoretically proved. Based on this, the periodic wafer processing and transportation procedure for both single arm robot and processing module is analyzed. Meanwhile, the schedulability conditions for cluster tools are proved. The simulation experiments are carried out to test the model and schedulable conditions, the results reveal the validity and feasibility of the presented model.