• DocumentCode
    3667321
  • Title

    Rib microring resonators in lithium niobate on insulator

  • Author

    Siew Shawn Yohanes;Soham Sataparno Saha;Mankei Tsang;Aaron James Danner

  • Author_Institution
    Department of Electrical and Computer Engineering, National University of Singapore, Singapore
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2μm of SiO2 and a LiNbO3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.
  • Keywords
    "Optical waveguides","Optical resonators","Lithium niobate","Optical device fabrication","Electron beams","Optical variables measurement","Insulators"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288825
  • Filename
    7288825