DocumentCode
3667321
Title
Rib microring resonators in lithium niobate on insulator
Author
Siew Shawn Yohanes;Soham Sataparno Saha;Mankei Tsang;Aaron James Danner
Author_Institution
Department of Electrical and Computer Engineering, National University of Singapore, Singapore
fYear
2015
Firstpage
1
Lastpage
2
Abstract
Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2μm of SiO2 and a LiNbO3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.
Keywords
"Optical waveguides","Optical resonators","Lithium niobate","Optical device fabrication","Electron beams","Optical variables measurement","Insulators"
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
ISSN
2160-5033
Print_ISBN
978-1-4673-6834-6
Electronic_ISBN
2160-5041
Type
conf
DOI
10.1109/OMN.2015.7288825
Filename
7288825
Link To Document