Title :
Cantilever array oscillators with nonlinear optical readout
Author :
Sevil Zeynep Lulec;Ulas Adiyan;Goksen G. Yaralioglu;Yusuf Leblebici;Hakan Urey
Author_Institution :
Koc University, Istanbul, TURKEY
Abstract :
MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
Keywords :
"Oscillators","Resonant frequency","Diffraction","Arrays","Optical feedback","Micromechanical devices","Diffraction gratings"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288835
