• DocumentCode
    3667339
  • Title

    Ultra-high Q silicon resonators in planarized LOCOS

  • Author

    Alex Naiman;Boris Desiatov;Liron Stern;Noa Mazurski;Joseph Shappir;Uriel Levy

  • Author_Institution
    Applied Physics department, The Hebrew University of Jerusalem, Israel
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3) silicon resonators, with nearly fully planar interface for multilayer silicon integration.
  • Keywords
    "Silicon","Optical resonators","Q-factor","Optical waveguides","Optical surface waves","Fabrication","Photonics"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288843
  • Filename
    7288843
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667339