• DocumentCode
    3667343
  • Title

    Polycrystalline silicon based photonic crystal Fabry-Perot etalon

  • Author

    Chong Pei Ho;Prakash Pitchappa;Chengkuo Lee

  • Author_Institution
    Department of Electrical &
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrated the design, fabrication and characterization of a polycrystalline silicon based photonic crystal Fabry-Perot etalon with a filtered transmission centered at 3.51μm. The high quality factor of 520 shows the possibility for high-resolution applications.
  • Keywords
    "Mirrors","Q-factor","Silicon","Cavity resonators","Optical filters","Fabrication","Reflection"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288847
  • Filename
    7288847
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667343